Evolution of TiOx-SiOx nano-composite during annealing of ultrathin titanium oxide films on Si substrate
Isha Yadav, Shankar Dutta, Akhilesh Pandey, Neha Yadav, Anshu Goyal, Ratnamala Chatterjee
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyRutileAmorphous solidAnnealing (glass)TitaniumRaman spectroscopySiliconSilicon oxideOxideTitanium oxideSputteringAnalytical Chemistry (journal)Thin filmChemical stateCrystalliteChemical engineeringNanotechnologyCrystallographyComposite materialOptoelectronicsMetallurgyOpticsSilicon nitrideEngineeringPhysicsChromatographyChemistryElectronic and Structural Properties of OxidesSemiconductor materials and devicesZnO doping and properties