Enhanced thickness uniformity of large-scale α-Ga2O3 epilayers grown by vertical hot-wall mist chemical vapor deposition
Sun‐Young Park, Minh‐Tan Ha, Kyoung‐Ho Kim, Le Van Lich, Yun‐Ji Shin, Seong‐Min Jeong, Se‐Hun Kwon, Si‐Young Bae
Topics & Concepts
Materials scienceMistEpitaxyChemical vapor depositionSubstrate (aquarium)Surface roughnessLayer (electronics)Surface finishDeposition (geology)CorundumSapphireVolumetric flow rateComposite materialOptoelectronicsOpticsQuantum mechanicsGeologyOceanographyPhysicsBiologyMeteorologyPaleontologyLaserSedimentGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques