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Transmission electron microscopy at the quantum limit

Stewart A. Koppell, Yonatan Israel, Adam J. Bowman, Brannon B. Klopfer, Mark A. Kasevich

2022Applied Physics Letters19 citationsDOI

Abstract

A number of visions for a new generation of dose-efficient electron microscopes have been advanced. These proposals, while inspired by quantum principles, make little contact with the broader field of quantum metrology. We discuss a framework for calculating the amount of information carried by each electron. This makes it possible to evaluate the potential effectiveness of any particular microscope architecture relative to the quantum limit for information per dose. In the case of phase imaging, we argue this limit is at least an order of magnitude beyond what is possible with aberration-free Zernike phase contrast.

Topics & Concepts

Quantum metrologyTransmission electron microscopyQuantumElectron holographyQuantum limitOpticsMicroscopeElectronScanning transmission electron microscopyMetrologyElectron microscopeMicroscopyLimit (mathematics)PhysicsNanotechnologyQuantum informationMaterials scienceQuantum mechanicsQuantum networkMathematicsMathematical analysisAdvanced Electron Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy Techniques
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