Smart Cut™ Piezo On Insulator (POI) substrates for high performances SAW components
E. Butaud, B. Tavel, Sylvain Ballandras, Marie Bousquet, Alexis Drouin, Isabelle Huyet, E. Courjon, Aymen Ghorbel, Alexandre Reinhardt, Alexandre Clairet, Florent Bernard, Isabelle Bertrand
Abstract
High quality single crystal LiTaO3 thin film transfer using Smart Cut™ technology has been demonstrated. Piezo On Insulator (POI) characteristics were optimized to the benefit of the guided SAW resonator performance. We will correlate these substrate parameters with some key figures of merit of guided SAW devices in terms of frequency control, k2, Q factor.
Topics & Concepts
ResonatorMaterials scienceInsulator (electricity)Figure of meritOptoelectronicsSubstrate (aquarium)Q factorPiezoelectricityComputer scienceElectronic engineeringAcousticsEngineeringComposite materialPhysicsOceanographyGeologyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsFerroelectric and Piezoelectric Materials