Ultrasensitive NO2 gas detection using ALD-grown ZnO-SiO2/Si thin film-based UV sensors
Bhavya Padha, Zahoor Ahmed, Shankar Dutta, Akhilesh Kumar Pandey, Naresh Padha, Monika Tomar, Anjali Sharma, Isha Yadav, Sandeep Arya
Topics & Concepts
Thin filmMaterials scienceAtomic layer depositionOptoelectronicsNanotechnologyGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors