Effect of hydrogen incorporation on the mechanical properties of DLC films deposited by HiPIMS in DOMS mode
A. M. Amorim da Costa, Fábio Ferreira, Julien L. Colaux, Alireza Vahidi, R. Serra, J.C. Oliveira
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceHydrogenSputter depositionTribologyComposite materialSputteringDeposition (geology)CoatingThin filmMetallurgyNanotechnologyOrganic chemistrySedimentBiologyPaleontologyChemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsTribology and Wear Analysis