Comparative investigations of DCMS/HiPIMS reactively sputtered WO3 thin films for photo-electrochemical efficiency enhancements
Saksorn Limwichean, Pitak Eiamchai, Chatchai Ponchio, Nat Kasayapanand, Mati Horprathum
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceThin filmSputter depositionPhotocurrentEllipsometryRaman spectroscopyAnnealing (glass)OptoelectronicsAnalytical Chemistry (journal)SputteringChemical engineeringNanotechnologyOpticsMetallurgyChemistryChromatographyPhysicsEngineeringTransition Metal Oxide NanomaterialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors