Microwave plasma modification-assisted shear-thickening polishing of single-crystal silicon carbide
Mingjie Shen, Min Wei, Lingwei Wu, Binbin Hong, Jiahao Ye, Hongyu Chen, Julong Yuan, Binghai Lyu, Chuansheng Wang, Hui Deng, Wei Hang
Topics & Concepts
PolishingMaterials scienceSilicon carbideCarbideThickeningPlasmaShear (geology)Composite materialMetallurgyQuantum mechanicsPolymer sciencePhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics