High-precision and high-speed etching of diamond surfaces using Fe–Ni alloy catalyzed H–O plasma etching
Dongyue Wen, Yicun Li, Jiwen Zhao, Xiaobin Hao, Sen Zhang, Benjian Liu, Yumin Zhang, V. G. Ralchenko, Bing Dai, Jiaqi Zhu
Topics & Concepts
DiamondEtching (microfabrication)Materials scienceWettingOptoelectronicsAlloyPlasmaPlasma etchingFabricationReactive-ion etchingIsotropic etchingNanotechnologyDry etchingGroove (engineering)MetallurgyComposite materialLayer (electronics)Alternative medicinePathologyQuantum mechanicsMedicinePhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques