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Study using ReaxFF-MD on the CMP process of fused glass in pure H2O/aqueous H2O2

Xiaoguang Guo, Junxin Huang, Song Yuan, Renke Kang, Dongming Guo

2021Applied Surface Science38 citationsDOI

Topics & Concepts

Chemical-mechanical planarizationReaxFFAqueous solutionPolishingAbrasiveMaterials scienceChemical engineeringSubstrate (aquarium)SlurryAbrasive machiningSiliconChemistryComposite materialHydrogen bondMetallurgyPhysical chemistryMoleculeOrganic chemistryEngineeringOceanographyGeologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques
Study using ReaxFF-MD on the CMP process of fused glass in pure H2O/aqueous H2O2 | Litcius