Tuneable polarity and enhanced piezoelectric response of ZnO thin films grown by metal–organic chemical vapour deposition through the flow rate adjustment
Quang Chieu Bui, Gustavo Ardila, Hervé Roussel, Carmen Jiménez, Isabelle Gélard, Odette Chaix‐Pluchery, Xavier Mescot, Sarah Boubenia, B. Salem, Vincent Consonni
Abstract
The formation process of ZnO thin films grown by pulsed-liquid injection metal–organic chemical vapour deposition (PLI-MOCVD) has a major impact on its morphological, structural, electrical and piezoelectric properties, but their correlation has not been elucidated yet nor decoupled from the thickness effects.
Topics & Concepts
Metalorganic vapour phase epitaxyChemical vapor depositionMaterials sciencePolarity (international relations)Thin filmMetalPiezoelectricityDeposition (geology)Combustion chemical vapor depositionVolumetric flow rateChemical engineeringNanotechnologyCarbon filmComposite materialChemistryMetallurgyLayer (electronics)EpitaxyGeologyPaleontologyQuantum mechanicsCellSedimentBiochemistryPhysicsEngineeringZnO doping and propertiesAdvanced Sensor and Energy Harvesting MaterialsAcoustic Wave Resonator Technologies