Experimental study on UV photocatalytic assisted chemical mechanical polishing process for single-crystal diamond
Weilin Huang, Huilong Li, Jiabin Lu, Da Hu, Lin Chen, Qiusheng Yan
Topics & Concepts
PolishingPhotocatalysisDiamondSingle crystalChemical-mechanical planarizationMaterials scienceChemical engineeringNanotechnologyComposite materialChemistryCrystallographyCatalysisEngineeringOrganic chemistryDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesElectronic and Structural Properties of Oxides