Improvement of microstructure and tribological properties of titanium nitride films by optimization of substrate bias current
Qi Xie, Zhiqiang Fu, Ziyi Liu, Wen Yue, Jiajie Kang, Li‐Na Zhu, Chengbiao Wang, Song-sheng Lin
Topics & Concepts
MicrostructureMaterials scienceSputter depositionTinTitanium nitrideSubstrate (aquarium)SputteringCavity magnetronMetallurgyComposite materialGrain sizeNitrideThin filmLayer (electronics)NanotechnologyGeologyOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials