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Wafer defect pattern classification with detecting out-of-distribution

Yusung Kim, Donghee Cho, Jee-Hyong Lee

2021Microelectronics Reliability24 citationsDOI

Topics & Concepts

WaferClassifier (UML)Cluster analysisArtificial intelligencePattern recognition (psychology)Semiconductor device fabricationComputer scienceData miningEngineeringElectrical engineeringIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques
Wafer defect pattern classification with detecting out-of-distribution | Litcius