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WO3 and WO3-x thin films prepared by DC hollow cathode discharge

J. Olejníček, A. Hrubantová, Lenka Volfová, Michaela Dvořáková, Michal Kohout, Drahoslav Tvarog, Ondrej Gedeon, H. Wulff, R. Hippler, Zdeněk Hubička

2021Vacuum14 citationsDOI

Topics & Concepts

Materials scienceArgonRaman spectroscopyTungstenStoichiometrySoda-lime glassAnalytical Chemistry (journal)CathodeThin filmChemical engineeringSubstrate (aquarium)NanotechnologyMetallurgyComposite materialChemistryOpticsOceanographyEngineeringGeologyPhysicsChromatographyPhysical chemistryOrganic chemistryTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties
WO3 and WO3-x thin films prepared by DC hollow cathode discharge | Litcius