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The effect of UV and thermally induced oxidation on the surface and structural properties of CVD diamond layers with different grain sizes

Anna Dychalska, Marek Trzciński, K. Fabisiak, K. Paprocki, W. Koczorowski, Szymon Łoś, Mirosław Szybowicz

2021Diamond and Related Materials14 citationsDOI

Topics & Concepts

MicrocrystallineDiamondMaterials scienceRaman spectroscopyX-ray photoelectron spectroscopyMaterial properties of diamondAmorphous solidChemical engineeringGrain sizeChemical vapor depositionThermal oxidationCrystalliteAnnealing (glass)Amorphous carbonLayer (electronics)ChemistryNanotechnologyComposite materialCrystallographyMetallurgyOpticsPhysicsEngineeringDiamond and Carbon-based Materials ResearchHigh-pressure geophysics and materialsMetal and Thin Film Mechanics
The effect of UV and thermally induced oxidation on the surface and structural properties of CVD diamond layers with different grain sizes | Litcius