Sensitive capacitive pressure sensors based on graphene membrane arrays
Makars Šiškins, Martin Lee, Dominique Wehenkel, Richard M. van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S. J. M. Peters, Dejan Davidovikj, Herre S. J. van der Zant, Peter G. Steeneken
Abstract
Abstract The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to $$47.8$$ <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"> <mml:mn>47.8</mml:mn> </mml:math> aF Pa −1 mm −2 , thereby outperforming the commercial sensors.