Point defect detection and strain mapping in Si single crystal by two-dimensional multiplication moiré method
Qinghua Wang, Shien Ri, Peng Xia, Jiaxing Ye, Nobuyuki Toyama
Abstract
, which is a good solution to the problem faced by traditional methods in detecting point defects. This study paves the way for the detection of vacancies, interstitial atoms, substitutional atoms, dislocations, slips, and interfaces in various crystal structures and 2D materials.
Topics & Concepts
Crystallographic defectMoiré patternMaterials scienceCrystal (programming language)Zone axisSemiconductorLattice (music)Distortion (music)Single crystalOpticsOptoelectronicsCrystallographyDiffractionComputer sciencePhysicsChemistryElectron diffractionAcousticsAmplifierCMOSProgramming languageIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy TechniquesThin-Film Transistor Technologies