Effects of wet chemical etching on surface band bending and electrical properties of Sn-doped β-Ga2O3 (101) substrate
Zhihong Yu, Rui Wang, Zining Wang, Man Xu, Tong Hou, Bo Fu, Dunwei Gong, Yujun Shi
Topics & Concepts
Substrate (aquarium)Materials scienceDopingBand bendingEtching (microfabrication)Isotropic etchingBendingOptoelectronicsDry etchingChemical engineeringComposite materialGeologyEngineeringLayer (electronics)OceanographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques