Elastic properties of porous silicon nitride fabricated via a low-temperature processing route
Navya Kota, Prasanta Jana, Siddhartha Roy
Topics & Concepts
Materials sciencePorous siliconSilicon nitridePorosityNitrideComposite materialSiliconMaterials processingOptoelectronicsLayer (electronics)Process engineeringEngineeringAdvanced ceramic materials synthesisThermal properties of materialsFerroelectric and Piezoelectric Materials