A temperature compensated biaxial eFM accelerometer in Epi-seal process
Seungyong Shin, Hyun-Keun Kwon, Gabrielle D. Vukasin, Thomas W. Kenny, Farrokh Ayazi
Topics & Concepts
Proof massAccelerometerResonatorSensitivity (control systems)Scale factor (cosmology)Materials scienceAcousticsDisplacement (psychology)Compensation (psychology)Frequency responsePhysicsOptoelectronicsVibrationElectronic engineeringElectrical engineeringEngineeringCosmologyQuantum mechanicsPsychotherapistPsychologyPsychoanalysisMetric expansion of spaceDark energyAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesGeophysics and Sensor Technology