Heterogeneous integration of thick GaN and polycrystalline diamond at room temperature through dynamic plasma polishing and surface-activated bonding

Runhua Gao, Xinhua Wang, Fengwen Mu, Xiaojing Li, Chong Wei, Wu Zhou, Jinan Shi, Ye Tian, Xiangjie Xing, Hongyue Li, Sen Huang, Qimeng Jiang, Wei Ke, Xinyu Liu