Measurements and modeling of residual stress in sputtered TiN and ZrN: Dependence on growth rate and pressure
Zhaoxia Rao, Eric Chason
Topics & Concepts
Materials scienceTinResidual stressGrowth rateStress (linguistics)Titanium nitrideSputteringNitrideCurvatureComposite materialMetallurgyThermodynamicsThin filmNanotechnologyLayer (electronics)PhilosophyMathematicsLinguisticsPhysicsGeometryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices