Inelastic mean free path measurement by STEM-EELS technique using needle-shaped specimen
Keiichiro Oh‐ishi, Tetsu Ohsuna
Topics & Concepts
Inelastic mean free pathMean free pathFOIL methodAnalytical Chemistry (journal)WaferElectron energy loss spectroscopyAmorphous solidMaterials scienceChemistryOpticsTransmission electron microscopyScatteringCrystallographyComposite materialPhysicsOptoelectronicsNanotechnologyChromatographyElectron and X-Ray Spectroscopy TechniquesSemiconductor materials and devicesSurface and Thin Film Phenomena