Effect of N2 flow rate on the crystallization and electrical performance of AlN films prepared by medium frequency magnetron sputtering
Juan Xi, Dayu Zhou, Nana Sun, Weiqi Zhang
Topics & Concepts
Materials scienceOhmic contactSputter depositionSputteringOptoelectronicsInsulator (electricity)NitrideLeakage (economics)CrystallizationElectric fieldCurrent densityThin filmComposite materialNanotechnologyChemical engineeringMacroeconomicsQuantum mechanicsPhysicsEconomicsLayer (electronics)EngineeringGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesSemiconductor materials and devices