Towards a deep understanding of oxidation in the material removal of GCr15 bearing steel during chemical mechanical polishing
Gangguo Xiao, Liang Jiang, Wumao Peng, Jinwei Liu, Changbang Deng, Linmao Qian
Topics & Concepts
PolishingMaterials scienceMetallurgyOxidation stateMetalChemical-mechanical planarizationKineticsChemical engineeringQuantum mechanicsEngineeringPhysicsAdvanced Surface Polishing TechniquesMetal Extraction and BioleachingAdvanced materials and composites