Litcius/Paper detail

Characterisation of the internal resonances of a clamped-clamped beam MEMS resonator

Praveen Kumar, Mandar M. Inamdar, Dnyanesh N. Pawaskar

2020Microsystem Technologies24 citationsDOI

Topics & Concepts

PhysicsResonance (particle physics)Galerkin methodNonlinear systemExcited stateBeam (structure)ResonatorAmplitudeExcitationDisplacement (psychology)Coupling (piping)Finite element methodNormal modeModal analysisAtomic physicsVibrationOpticsAcousticsMaterials scienceQuantum mechanicsMetallurgyThermodynamicsPsychotherapistPsychologyMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies