Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Hyunjae Jang, Changyong Oh, Tae Hyun Kim, Hyeong Wook Kim, Sang Ik Lee, Bo Sung Kim

2021Journal of Alloys and Compounds23 citationsDOI

Topics & Concepts

Atomic layer depositionLayer (electronics)Materials scienceDeposition (geology)Dual layerOptoelectronicsThin filmThin-film transistorChemical engineeringNanotechnologyEngineeringPaleontologySedimentBiologyThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices