Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer
Mandeep Jangra, Dhairya Singh Arya, Robin Khosla, Satinder K. Sharma
Topics & Concepts
AccelerometerMicroelectromechanical systemsMaterials scienceSpring (device)Sensitivity (control systems)AccelerationLaser Doppler vibrometerAcousticsElectronic engineeringComputer scienceOptoelectronicsEngineeringMechanical engineeringPhysicsWavelengthDistributed feedback laserClassical mechanicsOperating systemAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications