Effect of sputtering power on piezoresistivity and interfacial strength of SiCN thin films prepared by magnetic sputtering
Minming Jiang, Ke Xu, Ningbo Liao, Beirong Zheng
Topics & Concepts
Materials scienceSputteringComposite materialThin filmNanotechnologyMetal and Thin Film MechanicsZnO doping and propertiesGas Sensing Nanomaterials and Sensors