Carbon-doped ZnO thin films: A transparent conductive oxide for application in solar-blind photodetectors
Lijuan Ye, J. Yu, Hong Zhang, Honglin Li, Di Pang, Yan Tang, Chunyang Kong, Liang Fang, Haibo Ruan, Wanjun Li
Abstract
Transparent conductive oxide (TCO) films are crucial in optoelectronic devices, such as photodetectors, due to their unique blend of transparency and electrical conductivity. ZnO is a top choice for TCOs owing to its excellent properties, non-toxicity, and cost-effectiveness. In this work, we explore the potential of carbon doping to enhance the electrical properties of ZnO films for transparent conductive applications. Our findings reveal that C-doped ZnO (ZnO:C) films retain the pristine high quality and surface morphology despite an increase in defects with higher C doping. Notably, C doping does not compromise the visible light transmittance of ZnO films, while inducing a gradual increase in optical bandgap, indicative of the typical Burstein–Moss effect. As carbon doping increases, the ZnO:C films exhibit improved carrier concentration, lower resistivity, and sustained high mobility, achieving optimal performance with an electron concentration of 3.73 × 1019 cm−3, resistivity of 3.69 × 10−3 Ω cm, and mobility of 46.08 cm2 V−1 s−1. Finally, we utilized ZnO:C films as a transparent electrode material in ε-Ga2O3-based photodetector, achieving the development of transparent device and attaining high-performance solar-blind detection capabilities. This work provides a strategy for developing a transparent conductive oxide, with ZnO:C emerging as a promising rival to IIIA-doped ZnO for optoelectronic applications.