Excellent surface passivation of p-type TOPCon enabled by ozone-gas oxidation with a single-sided saturation current density of ∼ 4.5 fA/cm2

Na Lin, Zhenhai Yang, Haojiang Du, Zetao Ding, Zunke Liu, Haiyang Xing, Mingjing Xiao, Yali Ou, Wei Liu, Mingdun Liao, Baojie Yan, Shihua Huang, Yuheng Zeng, Jichun Ye