A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
Soham Das, Spandan Guha, Ranjan Kumar Ghadai, Bibhu P. Swain
Topics & Concepts
TinMaterials scienceTitanium nitrideScanning electron microscopeTitaniumNitrideMetallurgyCoatingChemical vapor depositionSiliconComposite materialNanotechnologyLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices