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A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere

Soham Das, Spandan Guha, Ranjan Kumar Ghadai, Bibhu P. Swain

2020Materials Chemistry and Physics68 citationsDOI

Topics & Concepts

TinMaterials scienceTitanium nitrideScanning electron microscopeTitaniumNitrideMetallurgyCoatingChemical vapor depositionSiliconComposite materialNanotechnologyLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices
A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere | Litcius