Spatial resolution in transmission electron microscopy
R.F. Egerton, Masashi Watanabe
Topics & Concepts
OpticsResolution (logic)Scanning transmission electron microscopyMaterials scienceImage resolutionHigh-resolution transmission electron microscopyBeam divergenceDiffractionBeam (structure)ElectronTransmission electron microscopyPhysicsLaser beam qualityLaserComputer scienceArtificial intelligenceQuantum mechanicsLaser beamsAdvanced Electron Microscopy Techniques and ApplicationsElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis