Research on the quality control technology of micro-topography machining based on in situ white light interferometry
Xuanzong Wu, Linlin Zhu, Fengzhou Fang, Xiaodong Zhang
Topics & Concepts
White light interferometryMachiningInterferometryMaterials scienceSurface finishSurface roughnessOpticsGroove (engineering)In situComposite materialMetallurgyPhysicsMeteorologyOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements