Composite complex agent based on organic amine alkali for BTA removal in post CMP cleaning of copper interconnection
Yang Liu, Da Yin, Baimei Tan, Wenqian Zhang, Tiecheng Han, Peng Zhao, Tongju Wang, Yawen Liu
Topics & Concepts
ChemistryBenzotriazoleCopperX-ray photoelectron spectroscopyInorganic chemistryElectrochemistryFourier transform infrared spectroscopyDissolutionNuclear chemistryChemical engineeringElectrodeOrganic chemistryPhysical chemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesSemiconductor materials and devices