A phase differential heterodyne interferometer for simultaneous measurement of straightness error and displacement
Yingtian Lou, Zhaoyang Li, Liping Yan, Benyong Chen, Jiancheng Jiang
Topics & Concepts
OpticsInterferometryHeterodyne (poetry)Phase (matter)Displacement (psychology)Differential (mechanical device)Differential phaseHeterodyne detectionAstronomical interferometerPhysicsAcousticsLaserPsychotherapistQuantum mechanicsPsychologyThermodynamicsAdvanced Measurement and Metrology TechniquesOptical measurement and interference techniquesSurface Roughness and Optical Measurements