Litcius/Paper detail

Surface wettability, morphology and optical characteristics of HfO2 films grown systematically by electron beam evaporation

Shashi Kant, Vemuri SRS Praveen Kumar, Mukesh Kumar, Neelam Kumari

2023Applied Physics A10 citationsDOI

Topics & Concepts

Materials scienceThin filmElectron beam physical vapor depositionAmorphous solidSurface roughnessScanning electron microscopeCrystallinityWettingMicrostructureOpticsEvaporationAnalytical Chemistry (journal)Composite materialNanotechnologyCrystallographyChemistryChromatographyThermodynamicsPhysicsSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignIntegrated Circuits and Semiconductor Failure Analysis