Deposition of the tin sulfide thin films using ALD and a vacuum annealing process for tuning the phase transition
Yeonsik Choi, Hyunwoo Park, Namgue Lee, Byunguk Kim, Junghoon Lee, Gucheol Lee, Hyeongtag Jeon
Topics & Concepts
X-ray photoelectron spectroscopyThin filmMaterials scienceRaman spectroscopyAmorphous solidTinAnnealing (glass)Atomic layer depositionAnalytical Chemistry (journal)CrystallographyChemical engineeringNanotechnologyChemistryMetallurgyOpticsPhysicsEngineeringChromatographyChalcogenide Semiconductor Thin FilmsQuantum Dots Synthesis And PropertiesZnO doping and properties