Reliability challenges in CMOS technology: A manufacturing process perspective
Qiao Teng, Yongkang Hu, Ran Cheng, Yongyu Wu, Guodong Zhou, Dawei Gao
Topics & Concepts
Reliability (semiconductor)Reliability engineeringProcess (computing)Semiconductor device fabricationQuality (philosophy)WaferElectronicsComputer scienceProcess optimizationCMOSManufacturing engineeringEngineeringElectronic engineeringElectrical engineeringOperating systemEpistemologyPower (physics)Quantum mechanicsPhysicsEnvironmental engineeringPhilosophyIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit Design