3D printing of micro-nano devices and their applications
Naibo Zhang, Zilai Wang, Zixin Zhao, Dongxing Zhang, Junyu Feng, Linghao Yu, Zhanhong Lin, Qiuquan Guo, Jianming Huang, Junfa Mao, Jun Yang
Abstract
In recent years, the utilization of 3D printing technology in micro and nano device manufacturing has garnered significant attention. Advancements in 3D printing have enabled achieving sub-micron level precision. Unlike conventional micro-machining techniques, 3D printing offers versatility in material selection, such as polymers. 3D printing technology has been gradually applied to the general field of microelectronic devices such as sensors, actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturing processes. Furthermore, 3D printing technology has also been instrumental in the fabrication of microfluidic devices, both through direct and indirect processes. This paper provides an overview of the evolving landscape of 3D printing technology, delineating the essential materials and processes involved in fabricating microelectronic and microfluidic devices in recent times. Additionally, it synthesizes the diverse applications of these technologies across different domains.