Morphology and surface properties of Cu thin film on Si (001)
H. Mes-adi, Youssef Lachtioui, K. Saadouni, M. Mazroui
Topics & Concepts
Substrate (aquarium)Materials scienceThin filmAmorphous solidSurface roughnessSurface finishMorphology (biology)Surface energyMixing (physics)Layer (electronics)EpitaxyComposite materialOpticsCrystallographyNanotechnologyChemistryBiologyQuantum mechanicsGeneticsOceanographyPhysicsGeologyCopper Interconnects and ReliabilityMicrostructure and mechanical propertiesSurface and Thin Film Phenomena