Al-delta-doped ZnO films made by atomic layer deposition and flash-lamp annealing for low-emissivity coating
Guoxiu Zhang, Oliver Steuer, Rang Li, Yu Cheng, René Hübner, M. Helm, Shengqiang Zhou, Yufei Liu, Sławomir Prucnal
Topics & Concepts
SuperlatticeMaterials scienceAnnealing (glass)OptoelectronicsLow emissivityAtomic layer depositionDopingThin filmTransmittanceEmissivityZinc selenideOpticsAnalytical Chemistry (journal)Layer (electronics)Composite materialChemistryNanotechnologyPhysicsChromatographyZnO doping and propertiesGa2O3 and related materialsTransition Metal Oxide Nanomaterials