GHz AlN-based multiple mode SAW temperature sensor fabricated on PEN substrate
Leonardo Lamanna, Francesco Rizzi, Venkat R. Bhethanabotla, Massimo De Vittorio
Topics & Concepts
Polyethylene naphthalateSurface acoustic waveMiniaturizationMaterials scienceElectromechanical coupling coefficientLamb wavesSubstrate (aquarium)OptoelectronicsSurface acoustic wave sensorRayleigh waveRayleigh scatteringAcousticsCoupling (piping)WirelessConformable matrixElectrical engineeringSurface wavePiezoelectricityLayer (electronics)TelecommunicationsComputer scienceOpticsEngineeringNanotechnologyComposite materialPhysicsOceanographyGeologyAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsAdvanced Sensor and Energy Harvesting Materials