The mechanism of ceria slurry on chemical mechanical polishing efficiency and surface quality of Gallium nitride
Wenhao Xian, Baoguo Zhang, Shitong Liu, Yijun Wang, Sihui Qin, Yang Liu
Topics & Concepts
Materials sciencePolishingSlurryChemical-mechanical planarizationNitrideMetallurgyMechanism (biology)Gallium nitrideQuality (philosophy)GalliumComposite materialLayer (electronics)PhilosophyEpistemologyAdvanced ceramic materials synthesisMetal and Thin Film MechanicsSemiconductor materials and devices