Effect of substrate bias on the properties of DLC films created using a combined vacuum arc
V. Zavaleyev, J. Walkowicz, Mirosław Sawczak, Dariusz Moszyński, Jacek Ryl
Topics & Concepts
Materials scienceNanoindentationSubstrate (aquarium)Raman spectroscopyScanning electron microscopeComposite materialDiamond-like carbonAmorphous solidThin filmX-ray photoelectron spectroscopySiliconVacuum arcAmorphous carbonNanotechnologyMetallurgyOpticsPlasmaChemical engineeringCrystallographyOceanographyGeologyEngineeringPhysicsChemistryQuantum mechanicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsCarbon Nanotubes in Composites