Calibration of beam vector deviation for four-axis precision on-machine measurement using chromatic confocal probe
Mengmeng Xi, Yongqing Wang, Haibo Liu, Haowei Xiao, Xu Li, He Li, Zhi Ding, Zhenyuan Jia
Topics & Concepts
Standard deviationCalibrationOffset (computer science)Chromatic aberrationAccuracy and precisionObservational errorOpticsMeasurement uncertaintyCoordinate-measuring machineComputer scienceChromatic scaleAlgorithmMathematicsPhysicsStatisticsProgramming languageAdvanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced optical system design