Galvanodynamic probing of tribologically assisted material removal under chemical control: A cobalt/copper case study for application in chemical mechanical planarization
Shiqiang Wei, D. Roy
Topics & Concepts
Chemical-mechanical planarizationCorrosionConsumablesMaterials scienceTribocorrosionCopperAlloyCobaltMetallurgyNanotechnologyElectrochemistryChemistryPolishingElectrodePhysical chemistryAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsForce Microscopy Techniques and Applications