Optical and surface properties of 3C–SiC thin epitaxial films grown at different temperatures on 4H–SiC substrates
Bingjun Wang, Junhua Yin, Daihua Chen, Xianjian Long, Lei Li, Hao-Hsiung Lin, Weiguo Hu, Devki N. Talwar, Renxu Jia, Yuming Zhang, Ian T. Ferguson, Wenhong Sun, Zhe Chuan Feng, Lingyu Wan
Topics & Concepts
X-ray photoelectron spectroscopyMaterials scienceRaman spectroscopyChemical vapor depositionAnalytical Chemistry (journal)Thin filmEpitaxyDiffractionRaman scatteringLayer (electronics)OpticsNuclear magnetic resonanceNanotechnologyChemistryChromatographyPhysicsSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesCopper Interconnects and Reliability