Synthesis and characterization of hexamethyldisilane films deposited on stainless steel by plasma-enhanced chemical vapour deposition
Neileth S. Figueroa, Juan Lucas Nachez, F.L. Freire, M.E.H. Maia da Costa
Topics & Concepts
Materials sciencePlasma-enhanced chemical vapor depositionRaman spectroscopyNanoindentationX-ray photoelectron spectroscopyChemical vapor depositionAnalytical Chemistry (journal)Carbon filmThin filmDeposition (geology)SpectroscopyChemical engineeringComposite materialNanotechnologyOpticsOrganic chemistryChemistryBiologySedimentQuantum mechanicsPhysicsPaleontologyEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsIon-surface interactions and analysis